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In 1983, the two journals, Journal of Vacuum Science and Technology A and B were launched when the original Journal of Vacuum Science and Technology was split.JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology. The scope includes, but is not limited to, the following topics:2-D materialsCompound semiconductor electronics and optoelectronicsDielectrics in micro- and nanoelectronicsGraphene, carbon nanotubes, and fullerenes: materials & devicesGroup IV semiconductor microelectronicsLithographyMicroelectromechanical and nanoelectromechanical systems and devices (MEMS & NEMS)Nanometer science and nanotechnologyNanostructured materials and devices including nanowires, nanoparticles and quantum dots, and organic and molecular electronicsPhotovoltaics, batteries, and other devices for energy conversion and storagePlasmonicsSpintronics and magnetic devicesVacuum nanoelectronics
1983年，原《真空科学与技术杂志》拆分后，创办了《真空科学与技术杂志A》和《真空科学与技术杂志B》。JVSTB致力于发表关于微电子学和纳米技术的原创研究报告、信函和评论文章。范围包括但不限于以下主题:二维材料复合半导体电子学和光电子学微电子和纳米电子中的介质石墨烯、碳纳米管和富勒烯:材料和器件第四组半导体微电子学光刻技术微机电和纳米机电系统及设备(MEMS & NEMS)纳米科学和纳米技术纳米结构材料和器件，包括纳米线、纳米颗粒和量子点，以及有机和分子电子学光电、电池和其他用于能量转换和储存的装置等离子自旋电子学和磁性器件真空纳电子学
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