《Journal Of Vacuum Science & Technology A》重点专注发布材料科学：膜-工程技术领域的新研究，旨在促进和传播该领域相关的新技术和新知识。鼓励该领域研究者详细地发表他们的高质量实验研究和理论结果。该杂志创刊至今，在材料科学：膜-工程技术领域，有较高影响力，对来稿文章质量要求较高，稿件投稿过审难度较大。欢迎广大同领域研究者投稿该杂志。
| CiteScore | SJR | SNIP | CiteScore排名 | |||
|---|---|---|---|---|---|---|
| 5.1 | 0.569 | 0.957 | 学科类别 | 分区 | 排名 | 百分位 |
|
大类：大类：PhysicsandAstronomy
小类：小类：CondensedMatterPhysics
|
Q2 | 135/434 | 69% | |||
|
大类：大类：PhysicsandAstronomy
小类：小类：SurfacesandInterfaces
|
Q2 | 19/57 | 67% | |||
|
大类：大类：PhysicsandAstronomy
小类：小类：Surfaces,CoatingsandFilms
|
Q2 | 45/132 | 66% | |||
| 按JIF指标学科分区 | 收录子集 | 分区 | 排名 | 百分位 |
|---|---|---|---|---|
| 学科：MATERIALS SCIENCE, COATINGS & FILMS | SCIE | Q3 | 13 / 23 | 45.7% |
| 学科：PHYSICS, APPLIED | SCIE | Q3 | 96 / 179 | 46.6% |
| 按JCI指标学科分区 | 收录子集 | 分区 | 排名 | 百分位 |
|---|---|---|---|---|
| 学科：MATERIALS SCIENCE, COATINGS & FILMS | SCIE | Q3 | 12 / 23 | 50% |
| 学科：PHYSICS, APPLIED | SCIE | Q2 | 88 / 179 | 51.12% |
文章名称
引用次数
Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
72
Status and prospects of plasma-assisted atomic layer deposition
26
Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements
23
Functional model for analysis of ALD nucleation and quantification of area-selective deposition
19
Review Article: Catalysts design and synthesis via selective atomic layer deposition
16
Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film
14
Review Article: Atomic layer deposition for oxide semiconductor thin film transistors: Advances in research and development
14
Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlook
13
Review Article: Crystal alignment for high performance organic electronics devices
12
Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry
11
国家/地区
发文量
TUSA
368
TJapan
77
TGERMANY (FED REP GER)
61
TSouth Korea
56
TFrance
44
TSweden
33
TCHINA MAINLAND
31
TEngland
29
TFinland
26
TNetherlands
26
